微影製程（英語：photolithography）是半導體元件製造製程中的一個重要步驟，該步驟利用曝光和顯影在光阻層上刻畫幾何圖形結構，然後通過蝕刻製程將光罩上的圖形轉移到所在基板上。這裡所說的基板不僅包含矽晶圓，還可以是其他金屬層、媒介層，例如玻璃、SOS中的藍寶石。 Meer weergeven 下面以基板上金屬連接的蝕刻為例講解微影過程。 首先，通過金屬化過程，在矽基板上布置一層僅數奈米厚的金屬層。然後在這層金屬上覆上一層光阻。這層光阻劑在曝光（一般是紫外線波長的 Meer weergeven 基板的準備 在塗抹光阻之前，矽基板一般需要進行預處理。一般情況下，基板表面上的水分需要蒸發掉，這一步通過脫水烘焙來完成。此外，為了提高 … Meer weergeven 微影製程中採用的感光物質被稱為光阻，主要分為正光阻和負光阻兩種。正光阻未被光照的部分在顯影後會被保留，而負光阻膠被感光的部分在顯影後會被保留。光阻不僅需要對指定的光照敏感，還需要在之後的金屬蝕刻等過程中保持性質穩定。不同的光阻一般具有不同 … Meer weergeven 超大規模積體電路（VLSI）是曝光使用投影系統。曝光機可以應用於積體電路產業鏈中晶圓製造、封裝測試，以及平板顯示、高亮度LED等領域。 Meer weergeven http://www.ichacha.net/lithographically.html#:~:text=%22lithographic%2C%20process%22%20%E4%B8%AD%E6%96%87%E7%BF%BB%E8%AF%91%20%3A%20%5B%E4%BD%9C%E4%B8%9A%20%E8%BF%90%E8%BE%93%5D%20%E5%B9%B3%E7%89%88%E5%8D%B0%E5%88%B7%E7%9A%84%E3%80%81%E5%8A%A0%E5%B7%A5%20%22lithographies%22,%E5%B9%B3%E7%89%88%E5%8D%B0%E5%88%B7%20%28%E6%9C%AF%29%20%E7%9A%84%EF%BC%8C%E5%8D%B0%E5%88%B7%2C%20%E5%8D%B0%E7%89%88%20%22lithographing%22%20%E4%B8%AD%E6%96%87%E7%BF%BB%E8%AF%91%20%3A%20n.
Lithography - an overview ScienceDirect Topics
Weblithography 在英語-中文（繁體）詞典中的翻譯. lithography. noun [ U ] uk / ˌlɪˈθɒɡ.rə.fi / us / ˌlɪˈθɑː.ɡrə.fi /. a printing process that involves using a stone or metal block on which … WebThe art or process of putting designs or writing, with a greasy material, on stone, and of producing printed impressions therefrom. The process depends, in the main, upon the … how to switch companies in business central
lithographic process的中文意思 - lithographic process中文翻譯
Web台灣 Taiwan 新竹市. Developed 2nm advanced lithography process technology (nano-sheet). High-k dielectric & metal gate (HKMG) and I/O oxide remove (IORM) layers. HKMG: 193i tetra-layer material survey, track, defect, CD-SEM, OPC (model, contour and scattering bar) and inline setup. IORM: KrF single-layer negative PR material survey, track ... Web19 uur geleden · 65nm process lithography. 65nm. AC timing changes are noted in this datasheet, and should be taken into account for all. new designs. 1.2. Overview. This section provides an overview of the features and capabilities of the P30. The P30 family provides density upgrades from 64-Mbit through 512-Mbit. WebDaLI is a universal table-top system for maskless lithography with all standard photoresists. Its comprehensive software solution covers all steps from design to illumination and makes DaLI an intuitive solution for the maskless lithography process, regardless of users’ prior knowledge. Using a precisely guided laser source for the illumination of lithographic … how to switch companions in swtor